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Miko Elwenspoek
Miko Elwenspoek
Verified email at utwente.nl
Title
Cited by
Cited by
Year
Comb-drive actuators for large displacements
R Legtenberg, AW Groeneveld, M Elwenspoek
Journal of Micromechanics and microengineering 6 (3), 320, 1996
8101996
Stiction in surface micromachining
N Tas, T Sonnenberg, H Jansen, R Legtenberg, M Elwenspoek
Journal of Micromechanics and Microengineering 6 (4), 385, 1996
7521996
The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control
H Jansen, M de Boer, R Legtenberg, M Elwenspoek
Journal of Micromechanics and Microengineering 5 (2), 115, 1995
7451995
A survey on the reactive ion etching of silicon in microtechnology
H Jansen, H Gardeniers, M de Boer, M Elwenspoek, J Fluitman
Journal of micromechanics and microengineering 6 (1), 14, 1996
6801996
Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry
FR Blom, S Bouwstra, M Elwenspoek, JHJ Fluitman
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1992
6001992
Silicon micromachining
M Elwenspoek, M Elwenspoek, HV Jansen
Cambridge university press, 2004
5902004
Mechanical microsensors
M Elwenspoek, RJ Wiegerink
Springer Science & Business Media, 2001
5752001
A practical guide for the fabrication of microfluidic devices using glass and silicon
C Iliescu, H Taylor, M Avram, J Miao, S Franssila
Biomicrofluidics 6 (1), 2012
4382012
A thermopneumatic micropump based on micro-engineering techniques
FCM Van de Pol, HTG Van Lintel, M Elwenspoek, JHJ Fluitman
Sensors and Actuators A: Physical 21 (1-3), 198-202, 1990
3941990
Electrostatic curved electrode actuators
R Legtenberg, J Gilbert, SD Senturia, M Elwenspoek
Journal of Microelectromechanical Systems 6 (3), 257-265, 1997
3671997
Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as …
HV Jansen, MJ De Boer, S Unnikrishnan, MC Louwerse, MC Elwenspoek
Journal of micromechanics and microengineering 19 (3), 033001, 2009
3622009
Micro resonant force gauges
HAC Tilmans, M Elwenspoek, JHJ Fluitman
Sensors and Actuators A: Physical 30 (1-2), 35-53, 1992
3581992
Capillary filling speed of water in nanochannels
NR Tas, J Haneveld, HV Jansen, M Elwenspoek, A van den Berg
Applied Physics Letters 85 (15), 3274-3276, 2004
3392004
Micromachining of buried micro channels in silicon
MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ...
Journal of Microelectromechanical systems 9 (1), 94-103, 2000
3192000
Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms
R Legtenberg, HAC Tilmans, J Elders, M Elwenspoek
Sensors and actuators A: Physical 43 (1-3), 230-238, 1994
3181994
Silicon nitride nanosieve membrane
HD Tong, HV Jansen, VJ Gadgil, CG Bostan, E Berenschot, CJM van Rijn, ...
Nano letters 4 (2), 283-287, 2004
3162004
Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures
MJ De Boer, JGE Gardeniers, HV Jansen, E Smulders, MJ Gilde, ...
Journal of microelectromechanical systems 11 (4), 385-401, 2002
3132002
The μ-flown: a novel device for measuring acoustic flows
HE de Bree, P Leussink, T Korthorst, H Jansen, TSJ Lammerink, ...
Sensors and actuators A: Physical 54 (1-3), 552-557, 1996
311*1996
Micro-liquid flow sensor
TSJ Lammerink, NR Tas, M Elwenspoek, JHJ Fluitman
Sensors and actuators A: Physical 37, 45-50, 1993
2841993
Anisotropic reactive ion etching of silicon using SF 6/O 2/CHF 3 gas mixtures
R Legtenberg, H Jansen, M de Boer, M Elwenspoek
Journal of the electrochemical society 142 (6), 2020, 1995
2731995
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