Comb-drive actuators for large displacements R Legtenberg, AW Groeneveld, M Elwenspoek Journal of Micromechanics and microengineering 6 (3), 320, 1996 | 817 | 1996 |
Stiction in surface micromachining N Tas, T Sonnenberg, H Jansen, R Legtenberg, M Elwenspoek Journal of Micromechanics and Microengineering 6 (4), 385, 1996 | 759 | 1996 |
The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control H Jansen, M de Boer, R Legtenberg, M Elwenspoek Journal of Micromechanics and Microengineering 5 (2), 115, 1995 | 750 | 1995 |
A survey on the reactive ion etching of silicon in microtechnology H Jansen, H Gardeniers, M de Boer, M Elwenspoek, J Fluitman Journal of micromechanics and microengineering 6 (1), 14, 1996 | 691 | 1996 |
Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry FR Blom, S Bouwstra, M Elwenspoek, JHJ Fluitman Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1992 | 605 | 1992 |
Silicon micromachining M Elwenspoek, M Elwenspoek, HV Jansen Cambridge university press, 2004 | 592 | 2004 |
Mechanical microsensors M Elwenspoek, RJ Wiegerink Springer Science & Business Media, 2001 | 580 | 2001 |
A practical guide for the fabrication of microfluidic devices using glass and silicon C Iliescu, H Taylor, M Avram, J Miao, S Franssila Biomicrofluidics 6 (1), 2012 | 446 | 2012 |
A thermopneumatic micropump based on micro-engineering techniques FCM Van de Pol, HTG Van Lintel, M Elwenspoek, JHJ Fluitman Sensors and Actuators A: Physical 21 (1-3), 198-202, 1990 | 395 | 1990 |
Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as … HV Jansen, MJ De Boer, S Unnikrishnan, MC Louwerse, MC Elwenspoek Journal of micromechanics and microengineering 19 (3), 033001, 2009 | 369 | 2009 |
Electrostatic curved electrode actuators R Legtenberg, J Gilbert, SD Senturia, M Elwenspoek Journal of Microelectromechanical Systems 6 (3), 257-265, 1997 | 367 | 1997 |
Micro resonant force gauges HAC Tilmans, M Elwenspoek, JHJ Fluitman Sensors and Actuators A: Physical 30 (1-2), 35-53, 1992 | 359 | 1992 |
Capillary filling speed of water in nanochannels NR Tas, J Haneveld, HV Jansen, M Elwenspoek, A van den Berg Applied Physics Letters 85 (15), 3274-3276, 2004 | 346 | 2004 |
Silicon nitride nanosieve membrane HD Tong, HV Jansen, VJ Gadgil, CG Bostan, E Berenschot, CJM van Rijn, ... Nano letters 4 (2), 283-287, 2004 | 323 | 2004 |
Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms R Legtenberg, HAC Tilmans, J Elders, M Elwenspoek Sensors and actuators A: Physical 43 (1-3), 230-238, 1994 | 321 | 1994 |
Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures MJ De Boer, JGE Gardeniers, HV Jansen, E Smulders, MJ Gilde, ... Journal of microelectromechanical systems 11 (4), 385-401, 2002 | 320 | 2002 |
Micromachining of buried micro channels in silicon MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ... Journal of Microelectromechanical systems 9 (1), 94-103, 2000 | 320 | 2000 |
The μ-flown: a novel device for measuring acoustic flows HE de Bree, P Leussink, T Korthorst, H Jansen, TSJ Lammerink, ... Sensors and actuators A: Physical 54 (1-3), 552-557, 1996 | 316* | 1996 |
Micro-liquid flow sensor TSJ Lammerink, NR Tas, M Elwenspoek, JHJ Fluitman Sensors and actuators A: Physical 37, 45-50, 1993 | 287 | 1993 |
Anisotropic reactive ion etching of silicon using SF 6/O 2/CHF 3 gas mixtures R Legtenberg, H Jansen, M de Boer, M Elwenspoek Journal of the electrochemical society 142 (6), 2020, 1995 | 275 | 1995 |