M. David Henry
M. David Henry
Sandia National Labs - Distinguished Member of the Technical Staff
Verified email at
Cited by
Cited by
Alumina etch masks for fabrication of high-aspect-ratio silicon micropillars and nanopillars
MD Henry, S Walavalkar, A Homyk, A Scherer
Nanotechnology 20 (25), 255305, 2009
Tunable visible and near-IR emission from sub-10 nm etched single-crystal Si nanopillars
SS Walavalkar, CE Hofmann, AP Homyk, MD Henry, HA Atwater, ...
Nano letters 10 (11), 4423-4428, 2010
Phase-exchange-driven wake-up and fatigue in ferroelectric hafnium zirconium oxide films
SS Fields, SW Smith, PJ Ryan, ST Jaszewski, IA Brummel, A Salanova, ...
ACS applied materials & interfaces 12 (23), 26577-26585, 2020
Pyroelectric response in crystalline hafnium zirconium oxide (Hf1-xZrxO2) thin films
JFI S. W. Smith, A. R. Kitahara, M. A. Rodriguez, M. D. Henry, M. T. Brumbach
Applied Physics Letters 110 (072901), 2017
Chemical sensing and/or measuring devices and methods
AP Homyk, MD Henry, A Scherer, S Walavalkar
US Patent 9,018,684, 2015
Ga+ beam lithography for nanoscale silicon reactive ion etching
MD Henry, MJ Shearn, B Chhim, A Scherer
Nanotechnology 21 (24), 245303, 2010
ICP etching of silicon for micro and nanoscale devices
MD Henry
California Institute of Technology, 2010
Advanced plasma processing: etching, deposition, and wafer bonding techniques for semiconductor applications
M Shearn, X Sun, MD Henry, A Yariv, A Scherer
Semiconductor technologies 27, 81-105, 2010
Al0. 68Sc0. 32N Lamb wave resonators with electromechanical coupling coefficients near 10.28%
G Esteves, TR Young, Z Tang, S Yen, TM Bauer, MD Henry, RH Olsson
Applied Physics Letters 118 (17), 2021
Methods for fabrication of high aspect ratio micropillars and nanopillars
MD Henry, AP Homyk, A Scherer, S Walavalkar
US Patent 8,148,264, 2012
Techniques of cryogenic reactive ion etching in silicon for fabrication of sensors
MD Henry, C Welch, A Scherer
Journal of Vacuum Science & Technology A 27 (5), 1211-1216, 2009
Radial pn junction, wire array solar cells
BM Kayes, MA Filler, MD Henry, JR Maiolo Iii, MD Kelzenberg, ...
2008 33rd IEEE Photovoltaic Specialists Conference, 1-5, 2008
Surface encapsulation for low-loss silicon photonics
M Borselli, TJ Johnson, CP Michael, MD Henry, O Painter
Applied Physics Letters 91 (13), 131117-131117-3, 2007
Origin of ferroelectric phase stabilization via the clamping effect in ferroelectric hafnium zirconium oxide thin films
SS Fields, T Cai, ST Jaszewski, A Salanova, T Mimura, HH Heinrich, ...
Advanced Electronic Materials 8 (12), 2200601, 2022
Size tunable visible and near-infrared photoluminescence from vertically etched silicon quantum dots
SS Walavalkar, AP Homyk, CE Hofmann, MD Henry, C Shin, HA Atwater, ...
Applied Physics Letters 98 (15), 2011
Controllable deformation of silicon nanowires with strain up to 24%
SS Walavalkar, AP Homyk, MD Henry, A Scherer
Journal of Applied Physics 107 (12), 2010
Three-dimensional etching of silicon for the fabrication of low-dimensional and suspended devices
SS Walavalkar, AP Homyk, MD Henry, A Scherer
Nanoscale 5 (3), 927-931, 2013
Reactive sputter deposition of piezoelectric Sc0. 12Al0. 88N for contour mode resonators
MD Henry, TR Young, EA Douglas, BA Griffin
Journal of Vacuum Science & Technology B 36 (3), 2018
Methods for fabricating passivated silicon nanowires and devices thus obtained
A Scherer, S Walavalkar, MD Henry, AP Homyk
US Patent 8,080,468, 2011
Thermal resistance and heat capacity in hafnium zirconium oxide (Hf1–xZrxO2) dielectrics and ferroelectric thin films
EA Scott, SW Smith, MD Henry, CM Rost, A Giri, JT Gaskins, SS Fields, ...
Applied Physics Letters 113 (19), 2018
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