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Robert Belan
Robert Belan
Kurt J. Lesker
Adresă de e-mail confirmată pe lesker.com
Titlu
Citat de
Citat de
Anul
Absence of negative ion effects during on‐axis single target sputter depositions of Y‐Ba‐Cu‐O thin films on Si (100)
M Migliuolo, RM Belan, JA Brewer
Applied physics letters 56 (25), 2572-2574, 1990
371990
Magnetron sputter deposition of magnetic materials from thick targets
JA Brewer, M Migliuolo, RM Belan
Proc. Annu. Tech. Conf. Soc. Vac. Coaters 33, 37-42, 1990
61990
Rectangular Hollow Sputter Source and Method of use Thereof
RM Belan, KJ Lesker III
US Patent App. 14/868,688, 2016
12016
Surrounding field sputtering source
M Jaszcar, RM Belan, KJ Lesker III
US Patent 10,358,713, 2019
2019
Hermetically sealed magnetic keeper cathode
M Jaszcar, RM Belan, R Patterson
US Patent 10,115,574, 2018
2018
Absence of Oxygen Resputtering During On-Axis Single Target Depositions ofY-Ba-Cu-O Thin Films
M Migliuolo, RM Belan, JA Brewer, PA Clairton
High TeDlperature Superconductivity, 403, 0
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