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Chandru Thambidurai
Chandru Thambidurai
Process Development Engineer, Cu Damascene group, Applied Materials
Adresă de e-mail confirmată pe amat.com
Titlu
Citat de
Citat de
Anul
Hybrid solar cells: basic principles and the role of ligands
RVPS Adam J. Moule, Lilian Chang, Chandru Thambidurai
Journal of Materials Chemistry 22 (2012), 2351, 2012
154*2012
Electrodeposition of Ru by atomic layer deposition (ALD)
C Thambidurai, YG Kim, JL Stickney
Electrochimica Acta 53 (21), 6157-6164, 2008
902008
Electrochemical atomic layer deposition of copper nanofilms on ruthenium
DK Gebregziabiher, YG Kim, C Thambidurai, V Ivanova, PH Haumesser, ...
Journal of crystal growth 312 (8), 1271-1276, 2010
452010
Copper nanofilm formation by electrochemical ALD
C Thambidurai, YG Kim, N Jayaraju, V Venkatasamy, JL Stickney
Journal of the Electrochemical Society 156 (8), D261, 2009
422009
E-ALD of Cu nanofilms on Ru/Ta wafers using surface limited redox replacement
C Thambidurai, DK Gebregziabiher, X Liang, Q Zhang, V Ivanova, ...
Journal of The Electrochemical Society 157 (8), D466, 2010
392010
Deposition of HgTe by electrochemical atomic layer epitaxy (EC-ALE)
V Venkatasamy, N Jayaraju, SM Cox, C Thambidurai, M Mathe, ...
Journal of Electroanalytical Chemistry 589 (2), 195-202, 2006
382006
Controlled Electrochemical Formation of GexSbyTez using Atomic Layer Deposition (ALD)
X Liang, N Jayaraju, C Thambidurai, Q Zhang, JL Stickney
Chemistry of Materials 23 (7), 1742-1752, 2011
322011
Optimization of CdTe nanofilm formation by electrochemical atomic layer epitaxy (EC-ALE)
V Venkatasamy, N Jayaraju, SM Cox, C Thambidurai, U Happek, ...
Journal of applied electrochemistry 36, 1223-1229, 2006
302006
Pb deposition on I-coated Au (111). UHV-EC and EC-STM studies
YG Kim, JY Kim, C Thambidurai, JL Stickney
Langmuir 23 (5), 2539-2545, 2007
282007
Studies of Hg (1-x) Cd x Te Formation by Electrochemical Atomic Layer Deposition and Investigations into Bandgap Engineering
V Venkatasamy, N Jayaraju, SM Cox, C Thambidurai, JL Stickney
Journal of the Electrochemical Society 154 (8), H720, 2007
272007
PtRu nanofilm formation by electrochemical atomic layer deposition (E-ALD)
N Jayaraju, D Banga, C Thambidurai, X Liang, YG Kim, JL Stickney
Langmuir 30 (11), 3254-3263, 2014
212014
Electrochemical deposition processes for semiconductor wafers
DK Gebregziabiher, J Klocke, C Sharbono, C Thambidurai, DJ Erickson
US Patent App. 13/835,870, 2014
22014
Copper Nano Film Formation Using Electrochemical ALD
C Thambidurai, N Jayaraju, YG Kim, JL Stickney
ECS Transactions 11 (7), 103, 2007
22007
Detection of electroplating bath contamination
C Thambidurai, RO Miller
US Patent App. 13/838,080, 2014
2014
Rapid Small Feature Cu Filling: Implications for" Bottom-up" Deposition Models
RO Miller, C Schieffer, C Thambidurai, J Klocke
ECS Meeting Abstracts, 1381, 2012
2012
E-ALD of Cu Nanofilms on Ru
C THAMBIDURAI, DK GEBREGZIABIHER, X LIANG, Q ZHANG, ...
Journal of the Electrochemical Society 157 (8), 2010
2010
Electrochemical ALD for Photovoltaics, Thermoelectrics and Fuel Cells
JL Stickney, D Banga, N Jayaraju, C Thambidurai
ECS Meeting Abstracts, 2675, 2009
2009
Electrochemical ALD for Photovoltaics, Thermoelectrice and Fuel Cells
John Stickney, Dhego Banga, Chandru Thambidurai
216th ECS Meeting, 2009
2009
Electrodeposition of thin films by electrochemical-atomic layer deposition (ALD)
C Thambidurai
University of Georgia, 2009
2009
Formation of Cu and Ru Nanofilms by Electrochemical ALD
C Thambidurai, N Jayaraju, JL Stickney
ECS Meeting Abstracts, 988, 2007
2007
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