Observations of ion-beam formation in a current-free double layer X Sun, AM Keesee, C Biloiu, EE Scime, A Meige, C Charles, RW Boswell
Physical review letters 95 (2), 025004, 2005
168 2005 An alternative method for gas temperature determination in nitrogen plasmas: Fits of the bands of the first positive system (B Π3g→ A Σ3u+) C Biloiu, X Sun, Z Harvey, E Scime
Journal of Applied Physics 101 (7), 2007
80 2007 Amorphous fluorocarbon polymer films obtained by plasma enhanced chemical vapor deposition from perfluoro-octane vapor. II. Dielectric and … C Biloiu, IA Biloiu, Y Sakai, H Sugawara, A Ohta
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 22 (4 …, 2004
75 2004 Parallel velocity and temperature of argon ions in an expanding, helicon source driven plasma X Sun, C Biloiu, R Hardin, EE Scime
Plasma Sources Science and Technology 13 (3), 359, 2004
74 2004 Determination of rotational and vibrational temperatures of a nitrogen helicon plasma C Biloiu, X Sun, Z Harvey, E Scime
Review of scientific instruments 77 (10), 2006
56 2006 Flow, flow shear, and related profiles in helicon plasmas E Scime, R Hardin, C Biloiu, AM Keesee, X Sun
Physics of plasmas 14 (4), 2007
48 2007 Laser induced fluorescence in a pulsed argon plasma E Scime, C Biloiu, C Compton, F Doss, D Venture, J Heard, E Choueiri, ...
Review of Scientific Instruments 76 (2), 2005
48 2005 Time-resolved measurements of double layer evolution in expanding plasma EE Scime, IA Biloiu, J Carr, SC Thakur, M Galante, A Hansen, ...
Physics of plasmas 17 (5), 2010
39 2010 Time-resolved measurements of double layer evolution in expanding plasma EE Scime, IA Biloiu, J Carr, SC Thakur, M Galante, A Hansen, ...
Physics of plasmas 17 (5), 2010
39 2010 Ion beam acceleration in a divergent magnetic field IA Biloiu, EE Scime, C Biloiu
Applied physics letters 92 (19), 2008
37 2008 Evolution of the parallel and perpendicular ion velocity distribution functions in pulsed helicon plasma sources obtained by time resolved laser induced fluorescence C Biloiu, X Sun, E Choueiri, F Doss, E Scime, J Heard, R Spektor, ...
Plasma Sources Science and Technology 14 (4), 766, 2005
37 2005 Scanning internal probe for plasma particle, fluctuation, and LIF tomographic measurements C Biloiu, E Scime, X Sun, B McGeehan
Review of scientific instruments 75 (10), 4296-4298, 2004
28 2004 One-and two-dimensional laser induced fluorescence at oblique incidence IA Biloiu, EE Scime, C Biloiu
Plasma Sources Science and Technology 18 (2), 025012, 2009
27 2009 Plasma Sources Sci. Technol X Sun, C Biloiu, R Hardin, EE Scime
Plasma Sources Sci. Technol 13 (359), 2004
26 2004 Extreme edge uniformity control A Likhanskii, M Petterson, J Hautala, A Renau, CA Rowland, C Biloiu
US Patent 10,665,433, 2020
21 2020 Spectral plasma temperature determination of thermionic vacuum arc in the titanium vapors C Biloiu, H Ehrich, G Musa
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 19 (3 …, 2001
19 2001 Apparatus and techniques to treat substrates using directional plasma and reactive gas S Liang, C Biloiu, GFR Gilchrist, V Singh, C Campbell, R Hertel, A Kontos, ...
US Patent 9,706,634, 2017
18 2017 In situ control of ion angular distribution in a processing apparatus C Biloiu, N Munoz, L Godet, A Renau
US Patent 9,293,301, 2016
18 2016 High density helicon plasma source for wide ribbon ion beam generation C Biloiu, A Perel, J Scheuer
US Patent 8,142,607, 2012
16 2012 Apparatus and techniques to treat substrates using directional plasma and reactive gas S Liang, C Biloiu, GFR Gilchrist, V Singh, C Campbell, R Hertel, A Kontos, ...
US Patent 10,004,133, 2018
15 2018