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Costel Biloiu
Costel Biloiu
Adresă de e-mail confirmată pe amat.com
Titlu
Citat de
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Anul
Observations of ion-beam formation in a current-free double layer
X Sun, AM Keesee, C Biloiu, EE Scime, A Meige, C Charles, RW Boswell
Physical review letters 95 (2), 025004, 2005
1692005
An alternative method for gas temperature determination in nitrogen plasmas: Fits of the bands of the first positive system (B Π3g→ A Σ3u+)
C Biloiu, X Sun, Z Harvey, E Scime
Journal of Applied Physics 101 (7), 2007
802007
Amorphous fluorocarbon polymer films obtained by plasma enhanced chemical vapor deposition from perfluoro-octane vapor. II. Dielectric and …
C Biloiu, IA Biloiu, Y Sakai, H Sugawara, A Ohta
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 22 (4 …, 2004
752004
Parallel velocity and temperature of argon ions in an expanding, helicon source driven plasma
X Sun, C Biloiu, R Hardin, EE Scime
Plasma Sources Science and Technology 13 (3), 359, 2004
742004
Determination of rotational and vibrational temperatures of a nitrogen helicon plasma
C Biloiu, X Sun, Z Harvey, E Scime
Review of scientific instruments 77 (10), 2006
562006
Laser induced fluorescence in a pulsed argon plasma
E Scime, C Biloiu, C Compton, F Doss, D Venture, J Heard, E Choueiri, ...
Review of Scientific Instruments 76 (2), 2005
492005
Flow, flow shear, and related profiles in helicon plasmas
E Scime, R Hardin, C Biloiu, AM Keesee, X Sun
Physics of plasmas 14 (4), 2007
482007
Time-resolved measurements of double layer evolution in expanding plasma
EE Scime, IA Biloiu, J Carr, SC Thakur, M Galante, A Hansen, ...
Physics of plasmas 17 (5), 2010
392010
Evolution of the parallel and perpendicular ion velocity distribution functions in pulsed helicon plasma sources obtained by time resolved laser induced fluorescence
C Biloiu, X Sun, E Choueiri, F Doss, E Scime, J Heard, R Spektor, ...
Plasma Sources Science and Technology 14 (4), 766, 2005
392005
Ion beam acceleration in a divergent magnetic field
IA Biloiu, EE Scime, C Biloiu
Applied physics letters 92 (19), 2008
372008
Scanning internal probe for plasma particle, fluctuation, and LIF tomographic measurements
C Biloiu, E Scime, X Sun, B McGeehan
Review of scientific instruments 75 (10), 4296-4298, 2004
282004
One-and two-dimensional laser induced fluorescence at oblique incidence
IA Biloiu, EE Scime, C Biloiu
Plasma Sources Science and Technology 18 (2), 025012, 2009
272009
Plasma Sources Sci. Technol
X Sun, C Biloiu, R Hardin, EE Scime
Plasma Sources Sci. Technol 13 (359), 2004
262004
Extreme edge uniformity control
A Likhanskii, M Petterson, J Hautala, A Renau, CA Rowland, C Biloiu
US Patent 10,665,433, 2020
222020
Apparatus and techniques to treat substrates using directional plasma and reactive gas
S Liang, C Biloiu, GFR Gilchrist, V Singh, C Campbell, R Hertel, A Kontos, ...
US Patent 9,706,634, 2017
192017
Spectral plasma temperature determination of thermionic vacuum arc in the titanium vapors
C Biloiu, H Ehrich, G Musa
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 19 (3 …, 2001
192001
In situ control of ion angular distribution in a processing apparatus
C Biloiu, N Munoz, L Godet, A Renau
US Patent 9,293,301, 2016
182016
High density helicon plasma source for wide ribbon ion beam generation
C Biloiu, A Perel, J Scheuer
US Patent 8,142,607, 2012
162012
Apparatus and techniques to treat substrates using directional plasma and reactive gas
S Liang, C Biloiu, GFR Gilchrist, V Singh, C Campbell, R Hertel, A Kontos, ...
US Patent 10,004,133, 2018
152018
Techniques for providing a multimode ion source
P Kurunczi, R Dorai, C Biloiu, W Platow
US Patent 7,812,321, 2010
152010
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